Innovac carries a complete line of fluids for all brands of oil-seals rotary vane, rotary piston pumps, rotary lobe pumps, and oil diffusion      pumps. Fluids are available with low vapor pressures, high strength compounds offered in a variety of viscosities. Besides the less expensive, general purpose hydrocarbon fluids, high performance hydrocarbon fluids are available for long life in corrosive environments. Perflourinated polyether fluids are supplied for oxygen service and use with all reactive gases. Silicone fluids are provided for thermal stability and oxidation resistance at hot boiler temperatures in oil diffusion pumps.
Innovac 19

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Innovac 19 is recommended for use in non-corrosive applications.  Through molecular distillation light end fractions are removed, resulting in lower vapor pressures and reduced backstreaming compared to undistilled refinery products.  These properties allow Innovac 19 to be used with more expensive diffusion pump fluids that are normally contaminated when combine with lesser fluids. Compared to refinery fluids Innovac19 offers reduced maintenance costs, better pumping cycles, longer fluid life, and a cooler running pump.

Specifications  
Vapor Pressure @ 25º C:
1x10-5 torr
Boiling Point @ .01 torr:
112ºC (234ºF)
Viscosity @ 40ºC:
55cSt (258 SUS)
Viscosity @ 100ºC:
8.1 cSt (52.7 SUS)
Pour Point:
-15ºC(5ºF)
Flash Point:
213ºC(415ºF)
Fire Point:
244ºC (472ºF)
Density:
0.86 g/mL
Innovac 20

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Innovac 20 is the standard mechanical pump fluid used in applications involving corrosive or reactive gases.  This fluid has been distilled to remove the majority of the light fractions present in all raw material feedstock.  The removal of these fractions slows the degradation process and reduces the rate of sludge accumulation in the mechanical pump.  Actual field use indicates that Innovac 20 tends to extend the useful service life of the fluid anywhere from 5 to 10 times that of standard hydrocarbon fluid.  Innovac 20 can also be used as diffusion pump fluid.  This represents a great advantage by allowing users to establish a homogenous system and thus prevents any cross-contamination.
 

 

Specifications  
Vapor Pressure @ 25º C: 3x10-6 torr
Boiling Pt. @ .01 torr: 127ºC(261ºF)
Viscosity @ 40ºC: 58 cSt (269 SUS)
Viscosity @ 100ºC: 8.5 cSt(54.1)
Pour Point: -10ºC(14ºF)
Flash Point: 224ºC(435ºF)
Fire Point: 259ºC(498ºF)
Density: 0.86 g/mL
Innovac 21

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Innovac 21 is used in applications where reactive or corrosive gases are present.   The additives used in this fluid are designed to resist oxidation and decomposition.  Innovac 21 uses molecular distillation to ensure good vapor pressure capabilities.
 

 

Specifications  
Vapor Pressure @ 25º C:
3x10-5 torr
Boiling Pt. @ .01 torr:
112ºC(234ºF)
Viscosity @ 40ºC:
55 cSt(258 SUS)
Viscosity @ 100ºC:
8.1 cST(52.7 SUS)
Pour Point:
-15ºC(5ºF)
Flash Point:
231ºC(415ºF)
Fire Point:
244ºC(472ºF)
Density:
0.86 g/mL
 

Innovac 31, Innovac 33 and Innovac 35

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TThe manufacturing process of Innovac 31, Innovac 33, and Innovac 35 has removed components to enhance the oxidation resistance of the fluid to exhibit outstanding chemical stability. This process also provides a clear oil base virtually free of impurities and extends the life performance of the fluid for customer satisfaction. Innovac 31, Innovac 33, and Innovac 35 can be used in corrosive applications involving increased temperatures.
 

              • Corrosive Service
              • Additive Package
              • High Thermal Stability
              • Reduced Backstreaming
Specifications
Innovac 31
Innovac 33
Innovac 35
Vapor Pressure @ 25º C:
<1x10-6 torr
<1x10-6 torr
<1x10-7 torr
Boiling Point @ .01 torr:
159ºC(318ºF)
166ºC(331ºF)
168ºC(334ºF)
Viscosity @ 40ºC:
37 cSt(173 SUS)
67 cSt(318 SUS)
115 cSt(512 SUS)
Viscosity @ 100ºC:
5.9cSt(45 SUS)
9.3 cSt(57 SUS)
13.5 cSt(69 SUS)
Pour Point:
-15ºC(-5ºF)
-10ºC(-14ºF)
-9ºC(-16ºF)
Flash Point:
233ºC(451ºF)
247ºC(477ºF)
285ºC(545ºF)
Fire Point:
269ºC(516ºF)
275ºC(527ºF)
281ºC(538ºF)
Density:
0.86g/mL
0.86g/mL
0.86 g/mL
 

Innovac 43

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Innovac 43 is a custom blended general purpose hydrocarbon fluid utilizing advanced feedstocks.  This rotary vane pump fluid is a lower cost alternative to molecularly distilled fluids.  It is useful where frequent fluid changes cause large volumes of fluid to be used.
 

 

Specifications  
Vapor Pressure @ 25º C:
2x10-4 torr
Boiling Point @ .01 torr:
95ºC(203ºF)
Viscosity @ 40ºC:
68 cSt(316 SUS)
Viscosity @ 100ºC:
8.7 cSt(54.8 SUS)
Pour Point:
-10ºC(14ºF)
Flash Point:
230ºC(446ºF)
Fire Point:
250ºC(482ºF)
Density:
0.88 g/mL

 

Innovac 45 and Innovac 45Z  

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Innovac 45 and 45Z synthetic hydrocarbon fluids permit strain-free cold starts as a result of their low pour point and high viscosity index (i.e. viscosity is lower than that of typical pump fluids at low temperatures).  In addition, because these fluids maintain their viscosity at high temperatures, it provides a good seal under full-load conditions.  Among other properties offered by Innovac 45's unique molecular structure are chemical resistance and high temperature stability superior to those of other high performance oils, such as white oils; and low vapor pressure.

 

Nontoxic, non corrosive, Innovac 45 is compatible with Buna-N, neoprene and Viton elastomers; and miscible with petroleum based oils, Freon, aromatic solvents, and flushing fluids.
 

Specifications
Innovac 45
Innovac 45Z
Vapor Pressure @ 25º C:
<1x10-7 torr
<1x10-7 torr
Boiling Point @ .01 torr:
133ºC(271ºF)
137ºC(279ºF)
Viscosity @ 40ºC:
53 cSt(247 SUS)
67 cSt(318 SUS)
Viscosity @ 100ºC:
7.0 cSt(49 SUS)
9.2 cSt(56 SUS)
Pour Point:
-59ºC(-74ºF)
-55ºC(-67ºF)
Flash Point:
264ºC(507ºF)
285ºC(545ºF)
Fire Point:
288ºC(550ºF)
305ºC(581ºF)
Density:
0.83 g/mL
0.83 g/mL

 

 

Innovac 77, Innovac 87, and Innovac 97

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Innovac 77 is a general purpose hydrocarbon fluid designed for use in rotary vane piston pumps.  Its high viscosity provides the necessary lubrication and sealing required for piston pumps in non-corrosive applications.  Innovac 87 and 97e high viscosity hydrocarbon fluids.  They are designed for use in large rotary piston pumps that cannot operate on low-viscosity fluids.  These fluids are not recommended for high oxygen concentrations or corrosive materials.

Specifications
Innovac 77
Innovac 87
Innovac 97
Vapor Pressure @ 25º C:
<5x10-5 torr
<1x10-4 torr
<4x10-4 torr
Boiling Pt. @ .01 torr:
138ºC(280ºF)
100ºC(212ºF)
158ºC(361ºF)
Viscosity @ 40ºC:
100 cSt (463 SUS)
175 cSt (800 SUS)
207 cSt (955 SUS)
Viscosity @ 100ºC:
9.9 cSt (58.8 SUS)
19.9 cSt (97 SUS)
18.1 cSt (88 SUS)
Pour Point:
-9ºC (16ºF)
-29ºC (-20ºF)
-12ºC (10ºF)
Flash Point:
257ºC (495ºF)
210ºC (410ºF)
235ºC (455ºF)
Fire Point:
291ºC (555ºF)
>240ºC (>464ºF)
277ºC (531ºF)
Density:
0.88 g/mL
0.89 g/mL
0.90 g/mL
 

Innovac 98 and Innovac 99

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Innovac 99 is a general purpose liquid ring pump fluid that exhibits excellent pump down and exceptional performance in the presence of water. Innovac 98 is a synthetic liquid ring pump fluid that offers excellent chemical resistance with long fluid service life and reduced pump maintenance.
 

Specifications
Innovac 98
Innovac 99
Vapor Pressure @ 25º C:
<4x10-4torr
<2x10-4 torr
Boiling Pt. @ .01 torr:
107ºC(225ºF)
112ºC(234ºF)
Viscosity @ 40ºC:
20 cSt (97 SUS)
28 cSt (134 SUS)
Viscosity @ 100ºC:
3.6 cSt (38.2 SUS)
4.5 cSt (41 SUS)
Pour Point:
-19ºC (-2.2º F)
-15ºC (-5ºF)
Flash Point:
187ºC (369ºF)
199ºC (390ºF)
Fire Point:
210ºC (410ºF)
221ºC (430ºF)
Density:
0.83g/mL
0.86 g/mL
 

 

Innovac TW and HVTW

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Innovac TW and HVTW fluids are specifically recommended for applications where exposure to reactive or corrosive gasses is prevalent. These products are a distilled USP grade hydrocarbon oil.  Both unsaturates and aromatics have been removed to result in a longer lasting, superior fluid. They also contain an excellent additive package for thermal and chemical resistance.  The high viscosity Innovac HVTW product is excellent  for use in piston pumps.  Typical applications include nitride decomposition, LPCVD, plasma etch, and ion implantation.  When compared to Innovac 20, Innovac TW will last 1.5 - 4 times longer.

  • Corrosive Service
  • High Thermal Stability
  • High Oxidation Stability
  • Reduced Backstreaming
    • Specifications
    Innovac TW
     Innovac HVTW
     
    Rotary Vane
    Piston Pump
    Vapor Pressure @ 25º C:
    <1x10-6 torr
    <1x10-7 torr
    Boiling Pt. @ .01 torr:
    158ºC (316ºF)
    161ºC (322ºF)
    Viscosity @ 40ºC:
    65 cSt (300 SUS)
    106 cSt (480 SUS)
    Viscosity @ 100ºC:
    9.1 cSt (55.7 SUS)
    12.9 cSt (69.8 SUS)
    Pour Point:
    -12ºC (10ºF)
    -12ºC (10ºF)
    Flash Point:
    243ºC (470ºF)
    249ºF (480ºF)
    Fire Point:
    270ºC (517ºF)
    277ºC (531ºF)
    Density:
    0.86 g/mL
    0.86 g/mL
     

    Fomblin YL-Vac Inert Vacuum Pump Fluids

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    Fomblin vacuum pump fluids are non-flammable, chemically inert, and thermally stable.   When used with proper pump filtration, Fomblin PFPE fluids provide exceptionally long service life.  These fluids have excellent lubricity properties and are available in viscosity grades suitable for use in all vacuum pumps.  Consult your Univac representative or sales engineer for assistance in selecting the proper viscosity grade for your specific pump.  Univac can provide a wide range of container sizes.
     

    Low vapor pressure Low volatility  Non-flammable  Good radiation stability 
    High dielectric properties  Excellent Compatibility Chemical Inertness  CFC free -Ozone friendly
    Good   solvent resistance No flash or fire point High Thermal Stability  Low surface tension
    Low toxicity      
           
           
    Specifications
    Y06/6
    Y14/6
    Y16/6
    Y25/6
    Vapor Pressure @ 25º C:
    3x10-6 torr
    2x10-7 torr
    2x10-6 torr
    4x10-8 torr
    Boiling Range:
    >250ºC
    >250ºC
    >250ºC
    >250ºC
    Viscosity @ 20ºC:
    64 cSt
    148 cSt
    168 cSt
    276 cSt
    Viscosity @ 100ºC:
    4 cSt
    7.5 cSt
    8.6 cSt
    10 cSt
    Pour Point:
    -50ºC
    -45ºC
    -45ºC
    -35ºC
    Flash Point:
    None
    None
    None
    None
    Fire Point:
    None
    None
    None
    None
    Density:
    1.88 g/mL
    1.89 g/mL
    1.89 g/mL
    1.90 g/mL

     

    Fomblin YL-Vac RP Inert Fluids

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    Fomblin YL-Vac RP incorporates a new patented Fomblin anti rust additive which enables the fluids to withstand even the most harsh chemical environments.  The additive, based upon the Fomblin perfluoro-polyether structure, does not affect the chemical resistance and high vacuum performance of the Fomblin YL-Vac fluids.
     

    Specifications
    Y06/6 RP
    Y14/6 RP
    Y16/6 RP
    Y25/6 RP
    Boiling Point:
    >270ºC
    >270ºC
    >270ºC
    >270ºC
    Viscosity @ 20ºC:
    73 cST
    165 cSt
    165 cSt
    290 cSt
    Vapor Pressure @ 20ºC:
    5x10-6 torr
    4x10-7 torr
    4x10-7 torr
    4x10-7 torr
    Vapor Pressure @ 100ºC:
    3x10-3 torr
    6x10-4 torr
    4x10-7 torr
    1x10-4 torr
    Flash Point:
    None
    None
    None
    None
    Density:
    1.88 g/mL
    1.89 g/mL
    1.89 g/mL
    1.90 g/mL

     

    Fomblin SV Inert Vacuum Pump Fluid

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    Fomblin SV is an advanced inert perfluorinated fluid with a back migration rate of virtually zero.  This fluid is excellent n dry etcher and CVD applications without investing in dry pump technology.
     

    Specifications  
    Vapor Pressure at 20ºC:
    5x10-9 torr
    Boiling Point:
    >270ºC
    Viscosity @ 20ºC:
    276 cSt
    Viscosity @ 100ºC:
    10 cSt
    Pour Point:
    -38 cSt
    Flash Point:
    None
    Density:
    1.90 g/mL

     

    Halovac Inert Pump Fluids

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    Halovac fluids are saturated hydrogen-free chloroflorocarbon polymer recommended as a cost effective alternative to PFPE fluids.  Halovac fluid provides the necessary sealing and lubricity required by vacuum mechanical pumps and will remain chemically inert up to 450-500ºF.  Use of Halovac fluids with proper pump filtration will result in exceptionally long service life at typical pump operating temperatures.  Halovac fluids have a vapor pressure suitable for many applications.  Three viscosity grades are available, suitable for vane and piston type mechanical pumps. Halovac 100, 125, 190.

     
    Specifications
    Halovac 100
    Halovac 125
    Halovac 190
    Vapor Pressure @ 25º C:
    3.3x10-4 torr
    2x10-4 torr 
    4.3x10-5 torr
    Boiling Range:
    >260ºC (>500ºF)
    >260ºC (>500ºF)
    >260ºC (>500ºF)
    Viscosity @ 40ºC:
    85 cSt
    105 cSt
    155 cSt
    Viscosity @ 100ºC:
    5.7 cSt
    6.2 cSt
    9.0 cSt
    Pour Point:
    -26ºC (-15ºF)
    -18ºC (0ºF)
    -9ºC (15ºF)
    Flash Point:
    None
    None
    None
    Fire Point:
    None
    None
    None
    Density:
    1.92 g/mL
    1.92 g/mL
    1.92 g/mL
     

    Innovac 220, Innovac 300, and Innovac 550

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    Innovac 220, Innovac 300, and Innovac 550 are phosphate fluids for mechanical pumps which are clear and amber in appearance.  These fluids are an excellent substitute for hydrocarbons fluids  in vacuum systems pumping oxygen at a greater concentration than atmospheric.  Phosphate fluids exhibit good oxidative resistance and thermal stability and are considered an inexpensive alternative to inert fluids.

    Specifications
    Innovac 220
    Innovac 300
    Innovac 550
    Vapor Pressure @ 25º C:
    <10-5 torr
    <10-5 torr
    <10-5 torr
    Boiling Point @ .01 torr:
    107ºC(225ºF)
    110ºC(230ºF)
    116ºC(241ºF)
    Viscosity @ 40ºC:
    47 cSt
    65 cSt
    117 cSt
    Pour Point:
    -20ºC(-4ºF)
    -15ºC(5ºF)
    -7ºC(19ºF)
    Flash Point:
    225ºC(437ºF)
    240ºC(464ºF)
    246ºC(475ºF)
    Density:
    1.150g/mL
    1.151 g/mL
    1.155 g/mL

     

    Innovac C- 19

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    • Vacuum distilled
    • Excellent lubricating qualities
    • Excellent vapor pressure characteristics
    DESCRIPTION
    C- 70/19 mechanical pump fluid is a distilled hydrocarbon fluid formulated for durability, low vapor pressure and excellent lubricating qualities.
    C- 70/19 is designed for use in all types of mechanical vacuum pumps and is classified as a general purpose mechanical pump fluid. Distillation separation procedure removes light end fractions, resulting in a lower vapor pressure, reduced back streaming and product purity. C- 70/19 is recommended for use in non-corrosive applications.
     

     
    SPECIFICATIONS
    Ultimate Pressure 10-5 Torr
    Specific Gravity .9008 gm/cc
    Boiling Point @ .01 Torr 125°C  (125°F)
    Viscosity @ 40°C 73.5 cSt  (340 SUS)
    Viscosity @ 100°C 11.14 cSt (63.4 SUS)
    Pour Point -6.6°C (20°F)
    Flash Point 210°C (410°F)
    Fire Point 249°C (480°F)

     

    Innovac C- TW-4

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    • Long lasting hydrocarbon fluid
    • USP grade, FDA approved
    DESCRIPTION
    C- TW-4 mechanical pump fluid is a 100% paraffinic distilled hydrocarbon fluid containing no additives. Both unsaturates and aromatics have been removed to provide maximum purity and provide greater resistance to corrosive or reactive gases. 
    TW-4 is recommended for applications such as plasma etch, deposition, (not recommended for use in O2 enriched systems), and vacuum distillation. TW-4 is a USP grade, FDA approved fluid.
     

     
    SPECIFICATIONS
    Ultimate Pressure 1.7 x 10-4 Torr
    Specific Gravity .8638 gm/cc
    Boiling Point @ .01 Torr 153°C  (307°F)
    Viscosity @ 40°C 61 cSt  (283 SUS)
    Pour Point -12°C (10°F)
    Flash Point 204°C (399°F)
    Fire Point 240°C (464°F)

     

    Innovac C- TW-7

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    • Low vapor pressure
    • Replaces inert fluids for some applications
    • Ideal for corrosive service
    • Longest lasting hydrocarbon fluid available
    DESCRIPTION
    C- TW-7 is a highly refined 100% paraffinic hydrocarbon fluid which has undergone a hydrogenation step and molecular distillation to assure maximum purity as a high performance mechanical pump fluid. This fluid will be more stable in the presence of mild corrosive gases than ordinary hydrocarbons because its paraffinic composition, (lack of aromatics and unsaturates), offers reduced reactivity.
    C- TW-7 is a less expensive alternative to synthetic fluids. Its low vapor pressure helps prevent back migration through the system. Additionally, TW-7 has been shown to outlast ordinary hydrocarbon fluids. Typical applications include nitride deposition, plasma etch, ion implantation, LPCVD and vacuum distillation. TW-7 is a USP grade fluid.
     

     
    SPECIFICATIONS
    Ultimate Pressure 10-6 Torr
    Specific Gravity .875 gm/cc
    Boiling Point @ .01 Torr 158°C  (316°F)
    Viscosity @ 40°C 64 cSt  (297 SUS)
    Pour Point -12°C (10°F)
    Flash Point 243°C (469°F)
    Fire Point 270°C (518°F)

      Innovac     C- 77

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    • Non-corrosive Applications
    • Excellent Sealing and Lubrication Properties
    • High Viscosity
    DESCRIPTION
    C- 77  designed for rotary vane piston pumps, is a  hydrocarbon based material for non-corrosive applications. The high viscosity provides the necessary sealing and lubricating properties required for piston pumps. 
     
     

     
    SPECIFICATIONS
    Ultimate Pressure 10-5 Torr
    Specific Gravity .88 gm/cc
    Boiling Point @ .01 Torr 138°C  (280°F)
    Viscosity @ 40°C 100 cSt  (463 SUS)
    Viscosity @ 100°C 9.9 cSt (58.8 SUS)
    Pour Point -9°C (16°F)
    Flash Point 257°C (495°F)
    Fire Point 291°C (555°F)
     

     

    Innovac PLASMA OIL 80

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    • Double vacuum distilled
    • Excellent lubricating qualities
    • Excellent vapor pressure characteristics
    DESCRIPTION
    Plasma Oil 80 is a hydrocarbon fluid developed especially for mechanical pump use. It has been carefully distilled to remove interfering high reactive components which can react with process gases to form sludge. Through high vacuum distillation, Plasma Oil 80 is purified to optimize characteristics such as very low vapor pressure, durability, resistance to sludge formation and lubricity.
    Recommended for mass spectrometers, some plasma etch and LPCVD applications.
     

     
    SPECIFICATIONS
    Ultimate Pressure 10-6 Torr
    Specific Gravity .8952 gm/cc
    Boiling Point @ .01 Torr 125°C  (257°F)
    Viscosity @ 40°C 70.84 cSt  (328 SUS)
    Pour Point -6.6°C (20°F)
    Flash Point 226°C (438°F)
    Fire Point 266°C (510°F)
     

     

    Innovac ULTRA Fluids

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    The Innovac ULTRA products ensure that the fluid will endure thermal and chemical stresses much better than standard vacuum pump fluid. The ultra-refined process eliminates nitrogen, sulfur and oxygen and the aromatic hydrocarbons, leaving a clear base stock virtually free of impurities. The excellent additive package will not volatilize under thermal stress. The antioxidant will stay in solution and bond up to four times as many radicals as other antioxidants, extending the life of your pump and fluid.

                • Excellent Ultimate Pressure
                • Rust Inhibition
                • High Thermal Stability
                • High Oxidation Stability
                • High Operating Temperatures
                • Corrosive Service
                • Reduced Back streaming
    Specifications
    Innovac 15 ULTRA
    Innovac 19 ULTRA
    Innovac 20 ULTRA
    Innovac 70 ULTRA
    Vapor Pressure @ 25º C:
    <1x10-6 torr
    <1x10-6 torr
    <1x10-7 torr
    <1x10-7 torr
    Boiling Point @
    .01 torr:
    159ºC(318ºF)
    166ºC(331ºF)
    168ºC(334ºF)
    166ºC(331ºF)
    Viscosity @ 40ºC:
    37 cSt
    55 cSt
    110 cSt
    72 cSt
    Pour Point:
    -15ºC(-5ºF)
    -10ºC(-14ºF)
    -9ºC(-16ºF)
    -10ºC(-14ºF)
    Flash Point:
    233ºC(451ºF)
    247ºC(477ºF)
    252ºC(486ºF)
    249ºC(480ºF)
    Density:
    0.86g/mL
    0.86g/mL
    0.86 g/mL
    0.86 g/mL
    Color:
    clear 
    clear
    clear
    clear

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       Last modified June 4, 2009